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標題Title: Surface textured molybdenum zinc oxide for light diffusion enhancement
作者Authors: 許進明,Hon-Bin Liao..等
上傳單位Department: 光電工程系
上傳時間Date: 2009-11-25
上傳者Author: 許進明
審核單位Department: 光電工程系
審核老師Teacher: 許進明
檔案類型Categories: 論文Thesis
關鍵詞Keyword: MZO, Molybdenum, Zinc oxide, Surface texture, Light trapping
摘要Abstract: Surface textures have been fabricated on a molybdenum doped zinc oxide (MZO) film using a shadowmask in a
co-sputter process. The surface textures yielded 5.3% and 10.1% of light diffusion in the visible light region for
MZO films with a thickness of 100 nmand 200 nm, respectively. Light diffusion in the near infra-red regionwas
slightly less with 4.5% for the 100 nm MZO film and 8.9% for the 200 nmMZO film. The enhanced light diffusion
will be beneficial to the light trapping efficiency of a-Si/μ-Si based thin film solar cells.

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2009_11_343d0702.pdf 540Kb pdf 539 311
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