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標題Title: ENHANCED LIGHT DIFFUSION USING SHADOW MASK BASED SURFACE TEXTURING TECHNIQUE
作者Authors: 許進明,Chia-Ran Chang..等
上傳單位Department: 光電工程系
上傳時間Date: 2009-11-25
上傳者Author: 許進明
審核單位Department: 光電工程系
審核老師Teacher: 許進明
檔案類型Categories: 論文Thesis
關鍵詞Keyword: MZO, solar cell, light trapping
摘要Abstract: Molybdenum doped zinc oxide (MZO) films have been fabricated on glass for the applications in a-
Si/-Si based thin film solar cells. To enhance light trapping efficiency, round MZO surface textures were formed on
top of a 100nm MZO film using co-sputter deposition through a micro shadow mask. The surface textures, having
physical dimensions of 110 nm in height and 120 m in diameter, evenly spread on the MZO film with a pitch of 300
m. These surface textures effectively caused ~ 4 % of light diffusion. The diffused light is believed to be able to
laterally travel in a-Si/-Si thin film absorbers, and its enhancing effect on the solar power efficiency is expected.

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2009_11_576a939b.pdf 149Kb pdf 701 221
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