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標題Title: Sintered diamond as a hybrid EDM and grinding tool for the micromachining of single-crystal SiC
作者Authors: 黃裕斌
上傳單位Department: 機械工程系
上傳時間Date: 2016-6-13
上傳者Author: 黃裕斌
審核單位Department: 機械工程系
審核老師Teacher: 戴子堯
檔案類型Categories: 課堂報告In-class Report
關鍵詞Keyword: EDM
摘要Abstract: Single-crystal silicon carbide (SiC)is an excellent material for hightemperature and high-power electronic devices and micro-electromechanical systems (MEMS).
Owing to its hardness and brittleness, SiC is very difficult to machine .
SiC is finished by chemomechanical polishing (CMP), but the material removal rate (MRR) is extremely low.
SiC is electrically conductive, meaning it can be finished by electrical discharge machining (EDM) , which has a much higher MRR.
We attempted the EDM of SiC using sintered diamond (polycrystalline diamond, PCD) as a tool electrode.
After EDM shaping, the same PCD tool was used to grind the electrical discharge machined (EDMed) surface and to remove both the subsurface damage and recast layer formed during EDM.

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