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標題Title: Magic Simulation of Atmospheric Pressure Plasma Torch Interactions with Surface
作者Authors: 鍾慎修,Max Chung..等
上傳單位Department: 電子工程系
上傳時間Date: 2010-6-18
上傳者Author: 鍾慎修
審核單位Department: 電子工程系
審核老師Teacher: 鍾慎修
檔案類型Categories: 論文Thesis
關鍵詞Keyword: atmospheric pressure plasma, surface, modification, plasma simulation, fluid, particle-in-cell
摘要Abstract: Atmospheric pressure plasma (APP) is gaining many grounds in surface modification, photo resist cleaning, medical instrument decontamination, and air pollution control. Previous simulation results were performed mostly with fluid simulations,in which potential profile, electron temperature, and plasma chemistry are available, but lack the details in field emission,secondary electrons, and space charge effect which is important in high pressure plasma. On the other hand, Particle-In-Cell
simulation is time consuming. We try to perform a simulation on APP source with MAGIC code, and direct the plasma towards a surface that is to be modified and observe the effect of applied voltage, flow speed, field emission, secondary electrons, Electron Energy Distribution Function (EEDF) and ion temperature. We separate these effects into different simulations, and plasma chemistry is ignored. Simulation results indicate just these particle simulation can reveal many useful insight into operations of an APP source on surface.

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2010_6_32c8162d.pdf 417Kb pdf 277 176
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