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標題Title: A ZnO nanowire-based humidity sensor
作者Authors: 邱裕中,Sheng-Po Chang..等
上傳單位Department: 電子工程系
上傳時間Date: 2011-5-20
上傳者Author: 邱裕中
審核單位Department: 電子工程系
審核老師Teacher: 邱裕中
檔案類型Categories: 論文Thesis
關鍵詞Keyword: A ZnO nanowire-based ,humidity sensor
摘要Abstract: In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80 degrees C, it was found that measured resistances were 5.9 x 10(5), 4.3 x 10(5), 3.7 x 10(5) and 3.2 x 10(5) Omega when measured with 25%, 50%, 70% and 90% relative humidity, respectively

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