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標題Title: Highly stable transparent and conducting gallium-doped zinc oxide thin films for photovoltaic applications
作者Authors: 董祐成,E. Fortunato ..等
上傳單位Department: 機械工程系
上傳時間Date: 2011-5-25
上傳者Author: 董祐成
審核單位Department: 機械工程系
審核老師Teacher: 林克默
檔案類型Categories: 課堂報告In-class Report
關鍵詞Keyword: GZO,photovoltaic applications
摘要Abstract: Transparent conducting oxide (TCO) with an optical transmission exceeding 80% in the visible region (500–650nm) and a resistivity less than 10-3 Ωcm have been widely used inavariety of applications for more than a half-century.
However , most of these techniques require moderate substrate temperatures to obtain low resistivity . Among the available techniques, RF magnetron sputtering presents several advantages including the production of highly transparent and conducting gallium zinc oxide (GZO) without heating the substrate.


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