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標題Title: STUDY ON ZNO FILM PROPERTIES UNDER THE EFFECTS OF PH VALUE
作者Authors: 林克默
上傳單位Department: 機械工程系
上傳時間Date: 2009-11-17
上傳者Author: 林克默
審核單位Department: 機械工程系
審核老師Teacher: 林克默
檔案類型Categories: 研討會報告Seminar Report
關鍵詞Keyword: ZnO:Al, Spectroscopic Ellipsometry
摘要Abstract: This study investigated the influences of pH values on the morphology and properties of ZnO:Al (AZO) films by sol-gel technique. Spectroscopic Ellipsometry (SE) technique was developed to characterize the microstructure properties of AZO films. Results show that film crystalline orientation was affected by the pH value and the aging time of the solution while highly-oriented AZO films did not have the highest conductivity. Besides, the film conductivity was also affected by its relative density which could be quickly obtained by SE technique after appropriated optical models had been established.

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2009_11_9cdc68af.pdf 197Kb pdf 621 126
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